摘要 |
The invention relates to a method for manufacturing a photovoltaic cell which includes, in series: from a semi-conductive substrate (1) made of crystalline silicon doped according to a first type of doping, and including a first surface (10) and a second surface (11) opposite said first surface (10), texturising (20) the surface of at least the first surface (10) of the substrate (1); forming, on the first texturised surface (10), a first semi-conductive zone (12) doped according to a second type of doping by implantation (21) of first doping elements made up of boron atoms in at least one portion of the substrate (1) and by activation (23) of said first doping elements via laser irradiation (4) of said first surface (10); thermal annealing (22) of the texturised substrate (1) prior to the laser irradiation of the first surface (10), said prior thermal annealing (22) being carried out at a temperature of 600ºC to 950°C, for a time longer than one minute. |