SOLID SOURCE VAPOR DELIVERY PACKAGE AND METHOD

摘要

A solid source vapor delivery package is described, including a vaporizer vessel containing solid source material and configured to be heated to volatilized the solid source material to generate vapor for discharge from the vaporizer vessel, with a set point pressure regulator interiorly disposed in the vaporizer vessel for control of vapor discharged from the vaporizer vessel. Such solid source vapor delivery package is usefully employed to avoid backflow of dispensed vapor into the vaporizer vessel, and to otherwise avoid undesired flow anomalies and temperature and pressure fluctuations in downstream flow circuitry and the further downstream process tool receiving dispensed vapor from the package.