SUBSTRATE MACHINING APPARATUS

摘要

Provided is a substrate machining apparatus which can simplify components of a clamp apparatus. The substrate machining apparatus comprises: a belt (11) which returns a brittle material substrate; a preprocess apparatus which lays the brittle material substrate onto the belt (11) from above the belt (11); and a clamp device (40) which clamps the brittle material substrate laid on the belt (11). The clamp device (40) includes a substrate support part (51) which fixates the position of the belt (11) and supports the brittle material substrate from the bottom; and an arm (57) which rotates or moves with respect to the substrate support part (51) and inserts the brittle material substrate between the arm and the substrate support part (51).