发明名称 FABRICATION OF OPTICS WAFER
摘要 Fabricating an optics wafer includes providing a wafer comprising a core region composed of a glass-reinforced epoxy, the wafer further comprising a first resin layer on a top surface of the core region and a second resin layer on a bottom surface of the core region. The core region and first and second resin layers are substantially non-transparent for a specific range of the electromagnetic spectrum. The wafer further includes vertical transparent regions that extend through the core region and the first and second resin layers and are composed of a material that is substantially transparent for the specific range of the electromagnetic spectrum. The wafer is thinned, for example by polishing, from its top surface and its bottom surface so that a resulting thickness is within a predetermined range without causing glass fibers of the core region to become exposed. Respective optical structures are provided on one or more exposed surfaces of at least some of the transparent regions.
申请公布号 EP2885817(A4) 申请公布日期 2016.05.04
申请号 EP20130831783 申请日期 2013.08.19
申请人 HEPTAGON MICRO OPTICS PTE. LTD. 发明人 RUDMANN, HARTMUT
分类号 H01L27/146;B29D11/00;H01L31/0232 主分类号 H01L27/146
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