| 摘要 |
The present invention is related to a desmear module 1 for a horizontal galvanic or wet-chemical process line for metal, in particular copper, deposition on a substrate to be treated for a removal of precipitates comprising a desmear container 2 being connectable to a desmear unit 3, a pump 4 and at least a first liquid connection element 5 for connecting said pump with the desmear unit, wherein said pump is in conjunction with said desmear unit by said at least first liquid connection element; and wherein a treatment liquid level 6 is provided inside of the desmear module, which is above of an intake area 7 of the pump; wherein the desmear module further comprises at least a first liquid area 9, at least an adjacent second liquid area 10 comprising the intake area of the pump, and at least a first separating element 11 arranged between said at least first liquid area and said at least second liquid area. The present invention is further related to a method for selective separation and subsequent removal of desmear particles from such a desmear module. |
