| 摘要 |
A scanning-type Charged Particle Microscope (M), comprising:
- A specimen holder (7), for holding a specimen (S);
- A source (9), for producing a beam of charged particles;
- An illuminator, for directing said beam so as to irradiate the specimen;
- A detector, for detecting a flux of radiation emanating from the specimen in response to said irradiation;
- Scanning means, for producing relative scanning motion of the beam and specimen so as to cause the beam to trace out a scan path (P) on the specimen;
- A programmable controller that can be invoked to execute at least one automated procedure in the microscope,
wherein:
- Said scanning means comprise:
–ª Long-stroke scanning means (7'), for effecting scanning motion of relatively large amplitude and relatively low frequency;
–ª Short-stroke scanning means (15), for effecting scanning motion of relatively small amplitude and relatively high frequency;
- Said controller can be invoked to trace out a scan path comprising relatively small-amplitude movements, performed using said short-stroke scanning means, that combine into a resultant relatively large-amplitude migration, achieved with the aid of said long-stroke scanning means. |
