Methods of manufacture for micro-electro-mechanical system (MEMS)

摘要

A method of forming at least one Micro-Electro-Mechanical System (MEMS) includes forming a beam structure and an electrode on an insulator layer, remote from the beam structure. The method further includes forming at least one sacrificial layer over the beam structure, and remote from the electrode. The method further includes forming a lid structure over the at least one sacrificial layer and the electrode. The method further includes providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode. The method further includes venting the sacrificial layer to form a cavity. The method further includes sealing the vent hole with material. The method further includes forming a final via in the lid structure to the electrode, through the partial via.

主权项

1. A method of forming at least one Micro-Electro-Mechanical System (MEMS), comprising:
forming a beam structure; forming an electrode directly on a top surface of an insulator layer, remote from the beam structure; forming at least one sacrificial layer over the beam structure, and remote from the electrode; forming a lid structure over the at least one sacrificial layer and the electrode; providing simultaneously a vent hole through the lid structure to expose the sacrificial layer and to form a partial via over the electrode; venting the sacrificial layer to form a cavity; sealing the vent hole with material; and forming a final via in the lid structure to the electrode, through the partial via, wherein the partial via has a larger cross section diameter than the final via.