Vacuum isolation valve

摘要

The vacuum isolation valve includes a housing installed between a chamber and a chamber cleaning gas supply and including a tube connecting the chamber to the chamber cleaning gas supply, a tube isolator formed at a predetermined position of the tube, a first blocking unit installed to the housing, and a second blocking unit installed to the housing, for, when the first blocking unit moves in the first direction, maintaining communication between the chamber and the chamber cleaning gas supply by moving in a second direction and pressing the first blocking unit and for, when the first blocking unit moves in an opposite direction to the first direction, blocking communication between the chamber and the chamber cleaning gas supply.

主权项

1. A vacuum isolation valve, comprising:
a housing including a tube; a hollow tube isolator connected to the tube at a predetermined position of the tube, for selectively isolating the tube; a first blocking unit installed to the housing and configured to move in a first direction to a position above an opened first surface of the tube isolator; and a second blocking unit installed to the housing and configured to move in a second direction, the second blocking unit arranged to press the first blocking unit to selectively block the first opened surface, when the first blocking unit moves in the first direction, and configured to move further in the second direction and pass through the first surface of the tube isolator, being inserted into the tube isolator, and block the tube, in close contact with a surface facing the first surface, when the first blocking unit moves in an opposite direction to the first direction.