| 摘要 |
The present invention relates to a decompression apparatus for reducing the power consumption of a vacuum pump, which may reduce pressure on the exhaust side of the vacuum pump using a suction effect due to a flow of transfer gas during idling driving of the vacuum pump to reduce the power consumption of the vacuum pump and smoothly receive a flow of reactive byproduct gas during normal driving of the vacuum pump, thus enabling a serial connection to an exhaust pipe of the vacuum pump without a separate branch pipe. The decompression apparatus comprises: a main body connected to the exhaust pipe of the vacuum pump, and having an intermediate plate having a through hole through which pumped air passes provided at an internal point of the main body; a nozzle unit formed to pass through an outer wall adjacent to an inlet port of the main body and pass through the through hole of the intermediate plate inside of the main body to inject transfer gas toward an outlet portion of the main body, and having a suction hole for sucking pumped air discharged from the vacuum pump on an inlet port side of the main body with respect to the intermediate plate; and a check disk installed to move forward and backward while passing through the nozzle unit, blocking the through hole of the intermediate plate while moving backward when a degree of pressure of pumped air flowing into the main body is less than a certain level to lead the pumped air to flow only through the inside of the nozzle unit through the suction hole of the nozzle unit, and opening the through hole of the intermediate plate while moving forward when a degree of pressure of pumped air flowing into the main body is greater than or equal to a certain level to allow the pumped air to flow through the through hole of the intermediate plate. |
