Laser apparatus

摘要

A laser apparatus according to embodiments may include a laser chamber including a laser gain medium; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber; and a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed.

主权项

1. A laser apparatus comprising:
a laser chamber including a laser gain medium, and a part of the laser chamber being constructed by an insulator; a power source; a first electrode to which a voltage is applied from the power source and a second electrode that is grounded, the first and second electrodes being disposed in the laser chamber, and the first electrode being disposed at a side where the insulator is disposed; a connector connected to the power source, and supporting the first electrode in a way that allows the first electrode to move toward a side where the second electrode is disposed; and an electrode moving mechanism being installed in the insulator and being connected to the first electrode to move the first electrode toward the side where the second electrode is disposed, wherein the electrode moving mechanism comprises shims which are stacked and removed corresponding to a wear volume of the first electrode.