Method of forming a hermetically sealed fiber to chip connection

摘要

Disclosed are methods of providing a hermetically sealed optical connection between an optical fiber and an optical element of a chip and a photonic-integrated chip manufactured using such methods.

主权项

1. A method of coupling an optical fiber to a chip, comprising:
providing a chip having a surface comprising a base surface and a chamfered surface adjacent to the base surface; providing an optical fiber having a terminating end surface and a chamfered surface adjacent to the terminating end surface, wherein the terminating end surface and the chamfered surface of the optical fiber are activated in a plasma to generate dangling bonds on the terminating end surface and the adjacent chamfered surface, whereby the dangling bonds facilitate coupling with the surface of the chip; directly contacting the terminating end surface of the optical fiber to the base surface of the chip such that the chamfered surface of the optical fiber directly contacts the chamfered surface of the chip; and applying a pressure between the chamfered surface of the optical fiber and the chamfered surface of the chip to ensure no gaps are formed between the optical fiber and the chip.