发明名称 |
LIQUID DELIVERY METHOD, LIQUID DELIVERY SYSTEM, AND COMPUTER-READABLE STORAGE MEDIUM |
摘要 |
A liquid delivery system enables liquid to be delivered using a simple configuration thereof. The liquid delivery method comprises: a process of enabling the liquid to circulate into a tube in accordance with pressure of gas filled in an inner space between an outer surface of the tube and a housing for a tube covering an outer side of the tube having elasticity; a process of obtaining a size of the pressure of the liquid circulating inside the tube as a first value; a process of obtaining the size of the pressure of the gas filled in the inner space as a second value; and a process of calculating a difference between the first value and the second value as a third value; and a process of detecting a state of the tube based on the third value. |
申请公布号 |
KR20160047996(A) |
申请公布日期 |
2016.05.03 |
申请号 |
KR20150146395 |
申请日期 |
2015.10.21 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
SASA TAKASHI;HASHIMOTO KATSUYA;SHIBATA DAIKI;OHTO TAKESHI |
分类号 |
F04B43/08;F04B43/00;F04B43/10;G03F1/22;G03F7/20;H01L21/027 |
主分类号 |
F04B43/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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