发明名称 LIQUID DELIVERY METHOD, LIQUID DELIVERY SYSTEM, AND COMPUTER-READABLE STORAGE MEDIUM
摘要 A liquid delivery system enables liquid to be delivered using a simple configuration thereof. The liquid delivery method comprises: a process of enabling the liquid to circulate into a tube in accordance with pressure of gas filled in an inner space between an outer surface of the tube and a housing for a tube covering an outer side of the tube having elasticity; a process of obtaining a size of the pressure of the liquid circulating inside the tube as a first value; a process of obtaining the size of the pressure of the gas filled in the inner space as a second value; and a process of calculating a difference between the first value and the second value as a third value; and a process of detecting a state of the tube based on the third value.
申请公布号 KR20160047996(A) 申请公布日期 2016.05.03
申请号 KR20150146395 申请日期 2015.10.21
申请人 TOKYO ELECTRON LIMITED 发明人 SASA TAKASHI;HASHIMOTO KATSUYA;SHIBATA DAIKI;OHTO TAKESHI
分类号 F04B43/08;F04B43/00;F04B43/10;G03F1/22;G03F7/20;H01L21/027 主分类号 F04B43/08
代理机构 代理人
主权项
地址