发明名称 VACUUM ABSORPTION SYSTEM AND METHOD OF PACKAGING MOTHER BOARD AND PACKAGING DEVICE
摘要 A vacuum absorption system and method of a packaging mother board and a packaging device are provided by the present invention, and belong to the technical field of substrate packaging. The vacuum absorption system of the packaging mother board in the invention comprises: a vacuum absorption platform; a bearing platform, which is arranged on the vacuum absorption platform and the edge of which is sealed with the edge of the vacuum absorption platform, and the bearing platform is used for bearing the packaging mother board, and on the bearing platform a plurality of absorption units are arranged, the absorption units are fitted with the vacuum absorption platform to absorb and fix the packaging mother board; a detecting unit, which is used for detecting the position relationships between the absorption units on the bearing platform and the packaging region on the packaging mother board; and an adjusting unit, which is used for adjusting the position of the bearing platform when the detecting unit detects that the positions of the absorption units on the bearing platform coincide with the packaging region on the packaging mother board, so that the positions of at least a part of the absorption units on the bearing platform do not coincide with the packaging region on the packaging mother board.
申请公布号 WO2016062038(A1) 申请公布日期 2016.04.28
申请号 WO2015CN76707 申请日期 2015.04.16
申请人 BOE TECHNOLOGY GROUP CO., LTD.;BEIJING BOE OPTOELECTRONICS TECHNOLOGY CO., LTD. 发明人 YANG, JIUXIA;BAI, FENG
分类号 H01L21/683;H01L21/60;H01L21/68 主分类号 H01L21/683
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