| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device that suppresses ununiform irradiation of ultraviolet ray to an irradiation target.SOLUTION: A light source device 1 has a light emission unit 20, control means 50 and a diffusion plate 41. The light emission unit 20 has plural first light emission elements 21 and plural second light emission elements 22. The first light emission elements 21 emit ultraviolet ray having a first peak wavelength. The second light emission elements 22 emit ultraviolet ray having a second peak wavelength different from the first peak wavelength, and arranged around the first light emission elements 21. The plural first light emission elements 21 and the plural second light emission elements 22 are arranged in a planar or linear shape so that at least one second light emission element 22 is located around the first light emission element 21. The control means 50 sets the relative illuminance of the light emission portion 20 located at the outer edge to be larger than the relative illuminance of the light emission portion 20 located at the center out of the light emission portions 20. The diffusion plate 41 diffuses ultraviolet ray emitted from the first light emission elements 21 and the second light emission elements 22, and applies the ultraviolet ray to an irradiation target object W.SELECTED DRAWING: Figure 1 |
