Electronic Device, Electronic Apparatus, and Moving Object

摘要

An electronic device includes an vibration element including an vibration body provided with an adjustment section, an electrode disposed on the vibration body, and a connection electrode electrically connected to the electrode, an IC so disposed that the IC faces the vibration element, terminals disposed on the side facing the upper surface of the IC and electrically connected to the connection electrode via a fixing member, wiring sections electrically connected to the terminals and located below the terminals, and a protective layer located above the wiring sections and disposed in a portion where the adjustment section overlaps with the wiring sections in a plan view.

主权项

1. An electronic device comprising:
an vibration element including an vibration body provided with an adjustment section, an electrode disposed on the vibration body, and a connection electrode electrically connected to the electrode; a semiconductor substrate so disposed that the semiconductor substrate faces the vibration element; a connection pad disposed between the semiconductor substrate and the vibration element and electrically connected to the connection electrode via a conductive connection member; a wiring line electrically connected to the connection pad and located between the connection pad and the semiconductor substrate; and a protective layer located between the wiring line and the vibration element and disposed in a portion where the adjustment section overlaps with the wiring line in a plan view.