发明名称 RESONATOR AND RESONANCE APPARATUS
摘要 Provided are a resonator and a resonance apparatus whereby oscillation of a holding body due to unnecessary oscillation of an oscillating section is suppressed, and size reduction is made possible. The present invention is provided with: an oscillating section having a semiconductor layer, a first piezoelectric film formed on the semiconductor layer, and a first upper electrode formed on the first piezoelectric film; a holding body that holds the oscillating section such that the oscillating section can oscillate; a connecting section that connects the oscillating section and the holding body to each other; and an oscillation suppressing section having a second piezoelectric film formed on the holding body, and a second upper electrode formed on the second piezoelectric film.
申请公布号 WO2016063863(A1) 申请公布日期 2016.04.28
申请号 WO2015JP79546 申请日期 2015.10.20
申请人 MURATA MANUFACTURING CO., LTD. 发明人 NAKAMURA, DAISUKE;NAKATANI, HIROSHI
分类号 H03H9/24;B06B1/06;H01L41/09 主分类号 H03H9/24
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