发明名称 EMBOSSING COMPOUND FOR EMBOSSING LITHOGRAPHY
摘要 An embossing material that can be hardened and used for embossing lithography, comprised of a mixture of: at least one polymerizable main component, and at least one secondary component. The invention also relates to a use of the embossing material for the primary forming of an embossing form.
申请公布号 EP3011390(A1) 申请公布日期 2016.04.27
申请号 EP20130731723 申请日期 2013.06.19
申请人 EV GROUP E. THALLNER GMBH 发明人 CHOUIKI, MUSTAPHA
分类号 G03F7/00 主分类号 G03F7/00
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