Planar design to non-planar design conversion method

摘要

A planar design to non-planar design conversion method includes following steps. At least a diffusion region pattern including a first side and a second side perpendicular to each other is received. A look-up table is queried to obtain a first positive integer according to the first side of the diffusion region pattern and a second positive integer according to the second side of the diffusion region pattern. Then, a plurality of fin patterns is formed. An amount of the fin patterns is equal to the second positive integer. The fin patterns respectively include a first fin length, and the first fin length is a product of the first positive integer and a predetermined value. The forming is performed by at least a computer-aided design (CAD) tool.

主权项

1. A planar design to non-planar design conversion method, comprising:
receiving at least a diffusion region pattern, the diffusion region pattern comprising a first side and a second side perpendicular to each other, wherein the receiving is performed by at least a computer system; querying a look-up table to obtain a first positive integer according to the first side of the diffusion region pattern and a second positive integer according to the second side of the diffusion region pattern, wherein the querying is performed by the computer system; and forming a plurality of fin patterns, an amount of the fin patterns is equal to the second positive integer, and the fin patterns respectively comprising a first fin length, wherein the first fin length is a product of the first positive integer and a predetermined value, wherein the forming is performed by at least a computer-aided design (CAD) tool, and the predetermined value is a minimal width in a graphic software.