| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flow sensor with low electric power consumption. <P>SOLUTION: A flow sensor includes: a base plate 1 whose rear face has a first recess 11 and whose front face above the first recess 11 has a second recess 12; a film 2 arranged on the front face of the base plate 1 in a manner to cover the second recess 12; and a first temperature measuring element 32, a heating element 31, and a second temperature measuring element 33 which are arranged on a rear face of the film 2 and which are stored in the second recess 12. <P>COPYRIGHT: (C)2013,JPO&INPIT |
