Variable inductor and semiconductor device using same

摘要

A variable inductor includes a spiral inductor, a loop conductor, and a switch for opening or short-circuiting an end of the loop conductor. The loop conductor is formed in a direction perpendicular to the spiral inductor and is used for adjusting the inductance value of the spiral inductor by opening or short-circuiting the end of the loop conductor by the switch.

主权项

1. A variable inductor comprising:
a spiral inductor arranged in a plane on a semiconductor substrate; a loop conductor including an opening that is arranged in one or more layers which are lower than the plane occupied by the spiral inductor and includes a first layer conductor and a second layer conductor; a dielectric layer arranged between the loop conductor and the spiral inductor; and a switch adapted to open or close a loop of the loop conductor, the dielectric layer being arranged between the switch and the spiral inductor; wherein the first layer conductor and the second layer conductor of the loop conductor define a plane, the plane defined by the first layer conductor and the second layer conductor of the loop conductor is arranged in a direction perpendicular to and beneath the plane occupied by the spiral inductor.