| 摘要 |
PROBLEM TO BE SOLVED: To provide a dividing method of a tabular workpiece by which a cross section of a dividing groove can be effectively polished.SOLUTION: The dividing method of a tabular workpiece for dividing a tabular workpiece includes: a dividing step for dividing the tabular workpiece into a plurality of chips by forming the dividing groove on the tabular workpiece that is held by a chuck table, by means of a first cutting blade; and a polishing step for polishing a side surface of the chip by polishing a cross section of the tabular workpiece along the dividing groove by means of a second cutting blade which is thinner than the first cutting blade and which has the particle of contained abrasive grains being smaller, after the dividing step is implemented. In the polishing step, a fluid is supplied to a surface at an opposite side of a surface of the second cutting blade in contact with the cross section, and the second cutting blade is pressed against the cross section of the tabular workpiece by pressure of the fluid.SELECTED DRAWING: Figure 4 |
