| 摘要 |
PROBLEM TO BE SOLVED: To provide a power supply device shortening completion operation time of the power supply device by consuming surplus power of a supply capacitor early, and a vacuum pump device mounted with the power supply device.SOLUTION: A power supply device 14 includes: a supply capacitor 14D that is charged with power supplied from outside, and supplies power to an internal circuit of the power supply device 14 in power supply stop; and a discharge control unit (control unit 14N) that discharges the supply capacitor 14D in completion of operation of the power supply device 14, and supplies power of the supply capacitor 14D due to the discharge to at least one of a motor 16, a magnetic bearing 60 and a regeneration brake resistance 14E.SELECTED DRAWING: Figure 2 |
