发明名称 |
BEAM EXTRACTION SLIT STRUCTURE AND ION SOURCE |
摘要 |
A beam extraction slit structure includes a plasma chamber interior surface that is, in operation, in contact with a plasma; a plasma chamber exterior surface that faces an extraction electrode; and a slit surface part that forms a beam extraction slit between the plasma chamber interior surface and the plasma chamber exterior surface in the beam extraction direction. The slit surface part includes a plasma meniscus fixing part formed in an area of relatively higher plasma density in the slit longitudinal direction to fixingly maintain a plasma meniscus of the plasma and a plasma meniscus non-fixing part formed in an area of relatively lower plasma density in the slit longitudinal direction to movably maintain the plasma meniscus of the plasma in the beam extraction direction. |
申请公布号 |
US2016111250(A1) |
申请公布日期 |
2016.04.21 |
申请号 |
US201514885586 |
申请日期 |
2015.10.16 |
申请人 |
Sumitomo Heavy Industries Ion Technology Co., Ltd. |
发明人 |
Sato Masateru |
分类号 |
H01J37/30;H01J27/14;H01J37/317;G21K1/00 |
主分类号 |
H01J37/30 |
代理机构 |
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代理人 |
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主权项 |
1. A beam extraction slit structure of an ion source plasma chamber adjacent to an extraction electrode, the extraction electrode positioned across a gap from an elongated slit of the beam extraction slit structure in a beam extraction direction, the elongated slit arranged along a slit longitudinal direction perpendicular to the beam extraction direction, the beam extraction slit structure comprising:
a plasma chamber interior surface that is, in operation, in contact with a plasma; a plasma chamber exterior surface that faces the extraction electrode; and an elongated slit surface that extends from the interior surface to the exterior surface in the beam extraction direction to define the elongated slit, the elongated slit surface including a plasma meniscus fixing part formed in a center of the elongated slit in the slit longitudinal direction to fixingly maintain a plasma meniscus of the plasma and a plasma meniscus non-fixing part formed in an end of the elongated slit in the slit longitudinal direction to movably maintain the plasma meniscus of the plasma in the beam extraction direction. |
地址 |
Tokyo JP |