| 发明名称 |
APPARATUS AND METHOD FOR MANUFACTURING DISPLAY APPARATUS |
| 摘要 |
An apparatus for manufacturing a display apparatus includes a stage supporting a substrate, a deposition gas supplying unit above the substrate, the deposition gas supplying unit spraying a deposition gas onto the substrate, and a first mask between the stage and the deposition gas supplying unit, the first mask including at least two first openings through which the deposition gas selectively passes. |
| 申请公布号 |
US2016111680(A1) |
申请公布日期 |
2016.04.21 |
| 申请号 |
US201514676959 |
申请日期 |
2015.04.02 |
| 申请人 |
SAMSUNG DISPLAY CO., LTD. |
发明人 |
CHUNG Yunah;PARK Eungseok;YUN Wonmin;LEE Byoungduk;CHO Yoonhyeung;JU Yongchan |
| 分类号 |
H01L51/52;C23C16/455;C23C16/04;H01L51/56;H01L27/32 |
主分类号 |
H01L51/52 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for manufacturing a display apparatus, the apparatus comprising:
a stage supporting a substrate; a deposition gas supplying unit above the stage, the deposition gas supplying unit spraying a deposition gas toward the stage; and a first mask between the stage and the deposition gas supplying unit, the first mask including at least two first openings through which the deposition gas selectively passes. |
| 地址 |
Yongin-City KR |
