发明名称 LEAK DETECTION USING ACOUSTIC WAVE TRANSDUCER
摘要 The present disclosure relates to a leak detection apparatus that includes an acoustic wave actuator mounted within a hermetically sealed chamber. The hermetically sealed chamber isolates a fluid medium from an external atmosphere and the acoustic wave actuator propagates an acoustic wave through the fluid medium. The apparatus further includes an acoustic wave transducer mounted within the hermetically sealed chamber and a comparison module. The acoustic wave transducer detects fluid pressure wave data related to the acoustic wave. The comparison module calculates an acoustic velocity based on the fluid pressure wave data and compares the acoustic velocity to a predetermined threshold velocity in order to recognize leaks in the hermetically sealed chamber.
申请公布号 US2016109322(A1) 申请公布日期 2016.04.21
申请号 US201414518817 申请日期 2014.10.20
申请人 HGST Netherlands B.V. 发明人 Eguchi Hajime;Choe Seong-Hun;Uiji Hiromi
分类号 G01M3/24 主分类号 G01M3/24
代理机构 代理人
主权项 1. A leak detection apparatus, comprising: an acoustic wave actuator mounted within a hermetically sealed chamber, wherein the hermetically sealed chamber isolates a fluid medium from an external atmosphere, wherein the acoustic wave actuator propagates an acoustic wave through the fluid medium; an acoustic wave transducer mounted within the hermetically sealed chamber, wherein the acoustic wave transducer detects fluid pressure wave data related to the acoustic wave; and a comparison module that calculates an acoustic velocity based on the fluid pressure wave data and compares the acoustic velocity to a predetermined threshold velocity.
地址 Amsterdam NL