DEPOSITION FILM FORMING APPARATUS, AND METHOD OF MANUFACTURING ELECTROPHOTOGRAPHIC PHOTORECEPTOR

摘要

PROBLEM TO BE SOLVED: To restrain foreign matter from adhering to a base body by suppressing dust production due to a slide when an auxiliary base body is pressed by pressing means in a longitudinal direction of a cylindrical base body.SOLUTION: A deposition film forming apparatus comprises: a pressure-reducible reaction vessel; a base body holder on which a cylindrical base body and an auxiliary base body are installed in this order; a pedestal which holds the base body holder; raw material gas introduction means of introducing a raw material gas into the reaction vessel; and electric power application means of decomposing the raw material gas. The deposition film forming apparatus has a pressing member consisting of a support part and a pressing part. The support part passes through the inside of the base body holder in a longitudinal direction of the base body holder and operates in the longitudinal direction of the base body holder, and thus the pressing part provided to an end of the support part moves from the inside to the outside of the base body holder. After the pressing member is set to a pressing position, the support part operates in the longitudinal direction of the base body holder and in a direction in which the pressing part moves from the outside to the inside of the base body holder, so that the pressing part presses the auxiliary base body against the cylindrical base body.SELECTED DRAWING: Figure 1