发明名称 X-ray analysis in air
摘要 An x-ray analysis apparatus comprises an electron beam assembly for generating a focused electron beam within a first gas pressure environment. A sample assembly is used for retaining a sample within a second gas pressure environment such that the sample receives the electron beam from the electron beam assembly and such that the gas pressure in the second gas pressure environment is greater than the gas pressure within the first gas pressure environment. An x-ray detector is positioned so as to have at least one x-ray sensor element within the first gas pressure environment. The sensor element is mounted to a part of the electron beam assembly which is proximal to the sample assembly and further arranged in use to receive x-rays generated by the interaction between the electron beam and the sample.
申请公布号 IL244660(D0) 申请公布日期 2016.04.21
申请号 IL20160244660 申请日期 2016.03.20
申请人 OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED 发明人
分类号 H01J 主分类号 H01J
代理机构 代理人
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