| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibration element reducing a reduction in Q value and exhibiting excellent performance, and further to provide a vibrator.SOLUTION: A vibration element 2 includes a base portion 4 and vibration arms 5 and 6 extending from the base portion 4 in a Y-axis direction, defines a Z-axis direction as a thickness direction and is provided with a vibration substrate 25 constituted of single crystal silicon. The vibration arms 5 and 6 are subjected to bending vibration in an XY in-plane direction. When a vibration frequency of each of the vibration arms 5 and 6 is represented by F[kHz], a width of each of the vibration arms 5 and 6 is represented by W[μm], a maximum value of a width W is represented by W[μm], a length of each of the vibration arms 5 and 6 is represented by L[μm], and a maximum value of a length L is represented by L[μm], at least one of a following formula (1) and a following formula (2) is satisfied.SELECTED DRAWING: Figure 1 |
