| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotation detection device with which it is possible to accurately detect whether or not an object to be inspected has rotated a prescribed number of times or more.SOLUTION: A rotation detection device 40 comprises: an optical path change unit 42 for changing the optical path of light; a signal generation unit 41 for irradiating an object 1 to be inspected with measurement light via the optical path change unit 42, receiving the measurement light from the object 1 to be inspected via the optical path change unit 42, and generating a peripheral velocity signal associated with the peripheral velocity of the object 1 to be inspected, on the basis of a change in the frequency of the measurement light; a control unit 44 for operating the optical path change unit 42 so that the measurement light is continuously radiated toward the reference position of the object 1 to be inspected while the object 1 to be inspected is moving in a measurement section; and a rotation determination unit 45 for determining, on the basis of the peripheral velocity signal, whether or not the object 1 to be inspected has rotated a prescribed number of times or more while the object 1 to be inspected was moving in the measurement section.SELECTED DRAWING: Figure 4 |
