APPARATUS FOR ADJUSTABLE LIGHT SOURCE

摘要

Apparatus for adjusting the position of lamp modules of a processing chamber are disclosed herein. Implementations generally include a process chamber comprising an enclosure defining an internal volume, a substrate support disposed in the internal volume of the process chamber, and a plurality of adjustable lamp modules. Each adjustable lamp module can include a radiation source, a lamp connector in connection with the radiation source, an adjustable mounting bracket connected to the lamp connector, the adjustable mounting bracket being pivotably connected to the process chamber; and a adjustable force device mounted in connection with the adjustable mounting bracket.

主权项

1. An apparatus for processing a semiconductor substrate, comprising:
a process chamber comprising an enclosure defining an internal volume; a substrate support disposed in the internal volume of the process chamber; a plurality of radiation emitters; an adjustable bracket comprising a base connected to at least one of the radiation emitters, the adjustable bracket being pivotably connected to the process chamber; and an adjuster connected with the adjustable bracket.