METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technique for manufacturing a flexible semiconductor device by using a flexible substrate, such as a resin substrate.SOLUTION: A flexible display device is manufactured by using a resin substrate by performing: a step of forming a resin substrate on a fixed substrate having a separation layer; a step of forming at least a TFT element on the resin substrate; and a step of peeling the resin substrate from the fixed substrate within a layer of the separation layer or at an interface of the separation layer, by irradiating the separation layer with a laser beam.SELECTED DRAWING: Figure 3