FILM THICKNESS MEASUREMENT DEVICE AND FILM THICKNESS MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film thickness measurement device capable of measuring the film thickness accurately and certainly.SOLUTION: The film thickness measurement device includes: a terahertz wave generator 19 for generating a terahertz wave; a prism 21 including an incidence plane 69 for receiving the terahertz wave emitted from the terahertz wave generator, an abutting surface 70 capable of abutting on the surface of a sample 3 including a first film 31a on the first film side, and an outgoing surface 71 through which the reflected wave from the sample is output; a terahertz wave detector 23 for detecting each of the S polarization component and P polarization component of the reflected wave output through the outgoing surface of the prism; and a control unit 6 for determining the thickness of the first film formed on the sample on the basis of the difference between the time waveform of the S polarization component and that of the P polarization component.SELECTED DRAWING: Figure 1