发明名称 MASS SPECTROMETER, USE THEREOF, AND METHOD FOR THE MASS SPECTROMETRIC EXAMINATION OF A GAS MIXTURE
摘要 The disclosure relates to a mass spectrometer for mass spectrometric examination of gas mixtures, including: an ionization device and an ion trap for storage and mass spectrometric examination of the gas mixture. In one aspect of the disclosure, the ionization device is embodied for supplying ions and/or metastable particles of an ionization gas and/or for supplying electrons to the ion trap for ionizing the gas mixture to be examined and the mass spectrometer is embodied to determine the number of ions and/or metastable particles of the ionization gas present in the ion trap and/or the number of ions of a residual gas present in the ion trap prior to examining the gas mixture. The disclosure also relates to the use of such a mass spectrometer and a method for mass spectrometric examination of a gas mixture.
申请公布号 US2016111269(A1) 申请公布日期 2016.04.21
申请号 US201514967699 申请日期 2015.12.14
申请人 Carl Zeiss Microscopy GmbH ;Carl Zeiss SMT GmbH 发明人 Fedosenko Gennady;Aliman Michel;Chung Hin Yiu Anthony;Ranck Albrecht;Gorkhover Leonid
分类号 H01J49/04;H01J49/14;H01J49/00 主分类号 H01J49/04
代理机构 代理人
主权项 1. A mass spectrometer, comprising: an ionization device; and an ion trap configured to store and mass spectrometrically examine a gas mixture, wherein: the ionization device is configured to supply: a) ions to the ion trap to ionize the gas mixture; b) metastable particles of an ionization gas to the ion trap to ionize the gas mixture; and/or b) electrons to the ion trap to ionize the gas mixture; andthe mass spectrometer is configured to determine the number of: a) ions present in the ion trap; b) metastable particles of the ionization gas present in the ion trap; and/or b) ions of a residual gas present in the ion trap prior to examining the gas mixture.
地址 Jena DE