Device and method for interferometric measuring of an object

摘要

The device has a radiation source (1) i.e. laser, for producing an output beam (2). A beam splitter device splits the beam into a measuring beam (3) and reference beams (4b, 4c). An optical overlay device and a detector are arranged in a direction such that the measuring beam and one of the reference beams partially reflected from an object (7) are superimposed on a surface of the detector. Another detector is cooperatively formed with the overlay device such that the measuring beam and the other reference beam are superimposed on a surface of the latter detector. An independent claim is also included for a method for an interferometric measurement of an object.