| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coater capable of appropriately applying a processing liquid exclusively to the back surface of a substrate even when the substrate is carried in an inclined state. <P>SOLUTION: A treating liquid discharging pipe 30 discharges a processing liquid toward the surface of an application roller 20 from the lower side of the substrate 100 and the upstream side in the direction in which a carrying roller 10 carries the substrate 100 before the substrate 100 to be carried by the carrying roller 10 reaches the application roller 20, and the discharge of the processing liquid from the treating liquid discharging pipe 30 is stopped before the back end of the substrate 100 being carried by the carrying roller 10 reaches the application roller 20. <P>COPYRIGHT: (C)2013,JPO&INPIT |
