| 摘要 |
The present invention provides a detection method for predetermined lines of division. The method in characterized by comprising the following steps: a step of imaging a first alignment mark: positioning an imaging unit to a processed object held by a chuck table, moving the imaging unit in the Y-axis direction, while irradiating stroboscopic light from the imaging unit to sequentially shoot the first alignment mark in the first direction in interval corresponding with the first alignment mark, and detecting coordinates of the first alignment mark; a step of imaging a second alignment mark: moving the imaging unit in the second direction which is opposite to the first direction, while irradiating stroboscopic light from the imaging unit to sequentially shoot the second alignment mark, and detecting coordinates of the second alignment mark; and a step for detecting the division lines: detecting a straight line formed by connecting the first alignment mark corresponding to the Y-axis direction and the second alignment mark as a first division line. |
