| 摘要 |
A light deflector (2, 30) is provided including a mirror unit (4) having a light reflection plane, a movable frame (6) to support the mirror unit (4), a support frame (8) disposed to surround the movable frame (6), and a pair of serpentine beams (10, 12). In the light deflector (2, 30), the serpentine beam has one end attached to the support frame (8), and another end attached to the movable frame (6), the mirror unit (4) oscillates as deformation of the serpentine beams (10, 12) caused by application of voltage is transferred to the mirror unit (4) through the movable frame (6), and a portion that moves due to the deformation of the serpentine beams (10, 12) is provided with a vibration damper (16) which reduces vibration for the mirror unit (4). |
