TARGET FOR SPARK VAPORIZATION WITH PHYSICAL LIMITING OF THE PROPOGATION OF THE SPARK.

摘要

The present invention relates to a target for an ARC source having a first body (3) composed of a material to be vaporized, which essentially comprises a surface which is intended to be vaporized on a plane, wherein the surface surrounds a central area on this plane, characterized in that a second body (7) is provided in the central area, which second body (7) is preferably in the form of a disk and is electrically isolated from the first body (3), in such a way that the second body (7) can essentially provide no electrons for maintenance of a spark.