| 摘要 |
The present invention relates to a substrate cover. According to the present invention, the substrate cover comprises a frame body and a conductive member. The frame body is a conductive frame body covering an upper region and a surface peripheral region of a substrate lithographed by a charged particle beam and includes a cutout part installed on one portion of an inner circumference of the conductive frame body and a recessed part installed on an outer circumferential side of an upper surface of the conductive frame body so that the conductive frame body can be arranged close to the cutout part in a width direction of the frame. The conductive member is a conductive member installed on the recessed part, thereby protruding inward toward the frame of the conductive frame body by penetrating the cutout part, and the conductive member includes a contact part connected to a surface of the substrate and a flange part covering the upper part of a gap between an inner wall of the cutout part and the conductive member. |
