发明名称 |
MANUFACTURING METHOD OF A SEMICONDUCTOR STRUCTURE |
摘要 |
A manufacturing method of a semiconductor structure is provided. The manufacturing method includes the following steps. A substrate is provided. A fin structure and an inter-layer dielectric layer are formed on the substrate. A plurality of gate structures is formed on the substrate. A cap layer is formed on the gate structures. A hard mask is formed on the cap layer. A first patterned photoresist layer covering the gate structures is formed on the hard mask. The hard mask is etched and patterned to form a patterned hard mask, such that the patterned hard mask covers the gate structures. A second patterned photoresist layer including a plurality of openings corresponding to the fin structure is formed on the patterned hard mask. The cap layer and the inter-layer dielectric layer are etched to form a plurality of first trenches exposing part of the fin structure. |
申请公布号 |
US2016104647(A1) |
申请公布日期 |
2016.04.14 |
申请号 |
US201414539225 |
申请日期 |
2014.11.12 |
申请人 |
UNITED MICROELECTRONICS CORP. |
发明人 |
Lin Chao-Hung;Tsai Shih-Hung;Fu Ssu-I;Huang Chih-Sen;Feng Li-Wei;Jenq Jyh-Shyang |
分类号 |
H01L21/8234;H01L21/768 |
主分类号 |
H01L21/8234 |
代理机构 |
|
代理人 |
|
主权项 |
1. A manufacturing method of a semiconductor structure, comprising:
providing a substrate; forming a fin structure and an inter-layer dielectric layer on the substrate; forming a plurality of gate structures on the substrate; forming a cap layer on the gate structures; forming a hard mask on the cap layer; forming a first patterned photoresist layer on the hard mask, wherein the first patterned photoresist layer covers the gate structures; etching and patterning the hard mask to form a patterned hard mask, such that the patterned hard mask covers the gate structures; forming a second patterned photoresist layer on the patterned hard mask, wherein the second patterned photoresist layer comprises a plurality of openings corresponding to the fin structure; and etching the cap layer and the inter-layer dielectric layer to form a plurality of first trenches, wherein the first trenches expose part of the fin structure. |
地址 |
HSINCHU TW |