| 主权项 |
1. A temperature control system, comprising:
a stage configured to support a workpiece and provided with a heat exchange medium flow path formed within the stage, the heat exchange medium flow path including a first end and a second end, a heat exchange medium flowing from the first end to the second end of the heat exchange medium flow path; a first valve; a second valve; a first heat exchange medium supply device including a supply port which supplies a first heat exchange medium adjusted to have a first temperature and a recovery port, the supply port being connected to the first end of the heat exchange medium flow path through the first valve; a second heat exchange medium supply device including a supply port which supplies a second heat exchange medium adjusted to have a second temperature higher than the first temperature and a recovery port, the supply port of the second heat exchange medium supply device connected to the first end of the heat exchange medium flow path through the second valve; and a control device configured to control the first valve and the second valve such that the first heat exchange medium and the second heat exchange medium are alternately supplied to the first end of the heat exchange medium flow path, wherein the control device includes: a heat quantity acquiring part configured to acquire a heat quantity required in making a temperature of the stage become equal to a target temperature; a supply time calculating part configured to calculate, based on the required heat quantity, supply times of the first heat exchange medium and the second heat exchange medium alternately supplied to the heat exchange medium flow path; and a valve control part configured to control the first valve and the second valve such that the first heat exchange medium and the second heat exchange medium are alternately supplied to the first end of the heat exchange medium flow path for the supply times calculated at the supply time calculating part. |
