| 摘要 |
The present invention addresses the problem of providing a pressure sensor with which a diaphragm and a strain sensor will not release from one another even if stainless steel is used for the diaphragm, which is less readily affected by the usage environment temperature, which has a sensitivity not governed solely by mechanical properties of the materials constituting the diaphragm, and which offers greater freedom of design for members constituting the pressure sensor. In order to solve the aforementioned problem, this pressure sensor is provided with: a diaphragm that is deformed by the pressure of a fluid; an elastic body that covers the entire surface of the diaphragm and has one side that is joined to the diaphragm; and a strain sensor that is arranged so as to be joined to an end side which is on the other side of the elastic body and is separated from a position corresponding to the center of the diaphragm, and that detects deformation of the elastic body in conjunction with deformation of the diaphragm as strain. The present invention is characterized in that the elastic body is made of a material that has a linear expansion coefficient close to the linear expansion coefficient of the material forming the strain sensor. |
