发明名称 ALIGNMENT DEVICE AND ALIGNMENT METHOD
摘要 PROBLEM TO BE SOLVED: To provide an alignment device which accurately expands a space between piece shape bodies, and to provide an alignment method.SOLUTION: An alignment device 10 includes: holding means 20 which may hold piece shape bodies CP on a holding surface 22A; partition means 30 which may insert contact means 32 between the piece shape bodies CP held on the holding surface 22A; and alignment means 40 which moves the contact means 32 and the holding surface 22A relative to each other and align the piece shape bodies CP at predetermined positions on the holding surface 22A in a predetermined direction.SELECTED DRAWING: Figure 1
申请公布号 JP2016054169(A) 申请公布日期 2016.04.14
申请号 JP20140178407 申请日期 2014.09.02
申请人 LINTEC CORP 发明人 KAWASAKI YOSHIHIKO
分类号 H01L21/68 主分类号 H01L21/68
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