发明名称 INTERCONNECTS THROUGH DIELECRIC VIAS
摘要 A dielectric layer includes a reflow via. The reflow via is formed by reflow of the dielectric layer. An interconnect is in contact through the reflow via.
申请公布号 US2016104675(A1) 申请公布日期 2016.04.14
申请号 US201314762799 申请日期 2013.01.29
申请人 HEWLETT-PACKARD DEVELOPMENT COMPANY, L. P. 发明人 Dooley Kevin;McQuaid Roger;Cheevers Liam;Fitzpatrick David;Byrne Lorraine
分类号 H01L23/522;H01L23/528;H01L21/768 主分类号 H01L23/522
代理机构 代理人
主权项 1. An apparatus comprising: a first metal layer; a dielectric layer disposed on the first metal layer, wherein the dielectric layer includes a reflow via, formed by reflow of the dielectric layer; and an interconnect in contact with the first metal layer through the reflow via.
地址 Houston TX US
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