发明名称 SUBSTRATE STORAGE CONTAINER
摘要 A handling member includes: a substantially plate-like handling member main body that is arranged along a pair of the side walls, respectively; a circular position-restriction through hole that is formed to extend through the handling member main body in a thickness direction of the handling member and with which the semicircular convex portion can be engaged; a handling member side guided portion that is engaged with the guide members and of which a movement is guided between the mounting position and the detachment position by the guide members; and a back-side guided portion that can be engaged with the back-side engaging portion by a movement of the handling member from the detachment position to the mounting position.
申请公布号 US2016104649(A1) 申请公布日期 2016.04.14
申请号 US201314893817 申请日期 2013.05.29
申请人 SHIN-ETSU POLYMER CO., LTD. ;MIRAIAL CO., LTD. 发明人 KANAMORI Yuta
分类号 H01L23/04;H01L23/32;H01L23/13 主分类号 H01L23/04
代理机构 代理人
主权项
地址 Chiyoda-ku, Tokyo JP