发明名称 |
SUBSTRATE STORAGE CONTAINER |
摘要 |
A handling member includes: a substantially plate-like handling member main body that is arranged along a pair of the side walls, respectively; a circular position-restriction through hole that is formed to extend through the handling member main body in a thickness direction of the handling member and with which the semicircular convex portion can be engaged; a handling member side guided portion that is engaged with the guide members and of which a movement is guided between the mounting position and the detachment position by the guide members; and a back-side guided portion that can be engaged with the back-side engaging portion by a movement of the handling member from the detachment position to the mounting position. |
申请公布号 |
US2016104649(A1) |
申请公布日期 |
2016.04.14 |
申请号 |
US201314893817 |
申请日期 |
2013.05.29 |
申请人 |
SHIN-ETSU POLYMER CO., LTD. ;MIRAIAL CO., LTD. |
发明人 |
KANAMORI Yuta |
分类号 |
H01L23/04;H01L23/32;H01L23/13 |
主分类号 |
H01L23/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Chiyoda-ku, Tokyo JP |