| 摘要 |
After a part (P) vacuum-chucked by a vacuum chucking nozzle (51) has been moved in the XY directions towards target XY coordinates (S120-S140), the waveform of Y-direction oscillation (oscillation waveform) occurring in the part (P) after reaching the vicinity of the target XY coordinates is measured (S150, S160), and at a timing at which displacement y of the part (P) crosses a node of the measured waveform, the movement in the Z direction is controlled such that the part (P) reaches a target Z coordinate (value: 0) (S170-S210). In so doing, misalignment of the mounting location can be further minimized, even in instances in which the part (P) is moved in the Z direction and mounted onto a substrate (S) while oscillation still persists subsequent to movement of the part (P) in the XY directions. |
