发明名称 |
SILICA GLASS CRUCIBLE FOR USE IN PULLING UP OF SILICON SINGLE CRYSTAL, AND METHOD FOR MANUFACTURING SAME |
摘要 |
The present invention provides a vitreous silica crucible which inhibits a deformation even when used under a high temperature condition for a long time, and a method for manufacturing the same. The vitreous silica crucible comprises: a substantially cylindrical straight body portion having an opening on the top end and extending in a vertical direction, a curved bottom portion, and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein, the vitreous silica crucible comprises a transparent layer on the inside and a bubble layer on the outside thereof, a compressive stress layer in which compressive stress remains in the inner surface side of the transparent layer, and a tensile stress layer in which tensile stress remains and is adjacent to the compressive stress layer at a gradual rate of change of stress. |
申请公布号 |
EP3006606(A1) |
申请公布日期 |
2016.04.13 |
申请号 |
EP20130886011 |
申请日期 |
2013.05.31 |
申请人 |
SUMCO CORPORATION |
发明人 |
SUDO, TOSHIAKI;KITAHARA, KEN;AIBA, AKIHIRO;OUSYUYA, KAZUSHI;YOSHIDA, FUMIE;HINOOKA, MAKIKO;KITAHARA, ERIKO;SATO, TADAHIRO |
分类号 |
C30B15/10;C03B19/09;C30B29/06;C30B35/00 |
主分类号 |
C30B15/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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