Method and measuring system for scanning multiple regions of interest

摘要

The invention relates to a method for carrying out measurements on at least one region of interest within a sample via a laser scanning microscope having focusing means for focusing a laser beam and having electro-mechano-optic deflector for deflecting the laser beam, the method comprising:
- providing a scanning trajectory for the at least one region of interest;
- providing a sequence of measurements and the corresponding scanning trajectories;
- providing cross-over trajectories between the scanning trajectories of two consecutive measurements;
- deflecting the laser beam via the electro-mechano-optic means for moving a focus spot of the focused laser beam along a scanning trajectory at an average scanning speed; and
- deflecting the laser beam via the electro-mechano-optic means for moving the focus spot of the laser beam along a cross-over trajectory at a cross-over speed having a maximum, the maximum of the cross-over speed being higher than the average scanning speed. The invention further relates to a measuring system for implementing the method according to the invention