发明名称 DEGASSING DEVICE
摘要 Provided is a degassing device which allows efficient maintenance. This degassing device is provided with upper and lower rollers (18A, 18B) which advance a film-forming material (10) in an advancement direction while vertically conveying the same, a plate heater (12) arranged adjacently to the film-forming material (10) moving back and forth between the rollers, and a chamber (14) having an outer wall. The outer wall includes a front wall (20) and a rear wall (22) each having an upper roller support unit (20a, 22a) and a lower roller support unit (20b, 22b). In at least one of the front wall (20) and the rear wall (22), a between-roller opening (40, 42) is formed in the region between the upper roller support unit and the lower roller support unit, and said between-roller openings (40, 42) have a shape cutting across the moving film-forming material (10) and the plate heater (12) in the advancement direction.
申请公布号 EP3006593(A1) 申请公布日期 2016.04.13
申请号 EP20140804339 申请日期 2014.05.08
申请人 KABUSHIKI KAISHA KOBE SEIKO SHO (KOBE STEEL, LTD.) 发明人 SEGAWA, TOSHIKI;OHBA, NAOKI
分类号 C23C14/02;C23C14/56;C23C16/02;C23C16/54 主分类号 C23C14/02
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