发明名称 Rinse liquid for insulating film and method of rinsing insulating film
摘要 A rinse liquid for an insulation layer, the rinse liquid including a solvent represented by the following Chemical Formula 1:;
申请公布号 US9312122(B2) 申请公布日期 2016.04.12
申请号 US201314090003 申请日期 2013.11.26
申请人 CHEIL INDUSTRIES, INC. 发明人 Bae Jin-Hee;Lee Han-Song;Lim Wan-Hee;Kim Go-Un;Kwak Taek-Soo;Kim Bo-Sun;Kim Sang-Kyun;Na Yoong-Hee;Park Eun-Su;Seo Jin-Woo;Song Hyun-Ji;Cho Youn-Jin;Han Kwen-Woo;Hwang Byeong-Gyu
分类号 H01L21/02;C11D11/00;C11D7/50;H01L27/108;H01L49/02;C11D7/26 主分类号 H01L21/02
代理机构 Lee & Morse, P.C. 代理人 Lee & Morse, P.C.
主权项 1. A rinse liquid for an insulation layer, the rinse liquid comprising: a solvent represented by the following Chemical Formula 1; and an auxiliary solvent, the auxiliary solvent including paraffin, or a derivative thereof, having a boiling point of about 190° C. to about 220° C. at atmospheric pressure, wherein, in the Chemical Formula 1, R1 is hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C5 to C30 heteroaryl group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted carbonyl group, or a combination thereof, and Ra to Re are each independently hydrogen, a substituted or unsubstituted C1 to C30 alkyl group, a substituted or unsubstituted C3 to C30 cycloalkyl group, a substituted or unsubstituted C6 to C30 aryl group, a substituted or unsubstituted C7 to C30 arylalkyl group, a substituted or unsubstituted C1 to C30 heteroalkyl group, a substituted or unsubstituted C2 to C30 heterocycloalkyl group, a substituted or unsubstituted C5 to C30 heteroaryl group, a substituted or unsubstituted C2 to C30 alkenyl group, a substituted or unsubstituted C2 to C30 alkynyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted carbonyl group, a hydroxy group, a halogen, or a combination thereof.
地址 Gumi-si, Kyeongsangbuk-do KR